Abstract

A survey of optical properties of sputtered materials in the spectral range of 145 nm to 800 nm has been performed. The optical constants n and k have been measured using ellipsometric techniques. Four combination materials have been created with the properties suitable for application in Attenuated Phase Shift Mask (APSM) manufacturing. The four combination materials have also been characterized, with the results presented.

Library of Congress Subject Headings

Small business--Environmental aspects; Production management--Environmental aspects; Business enterprises--Environmental aspects; ISO 14001 Standard

Publication Date

1-2003

Document Type

Thesis

Student Type

Graduate

Department, Program, or Center

Microelectronic Engineering (KGCOE)

Advisor

Bruce W. Smith

Advisor/Committee Member

Dale Ewbank

Advisor/Committee Member

Michael Jackson

Comments

Physical copy available from RIT's Wallace Library at HD30.255 .K43 2003

Campus

RIT – Main Campus

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