Poly(tetrafluoroethylene-co-hexafluoropropylene) (FEP) and tetrafluoroethylene-coperfluoroalkoxy vinyl ether) (PFA) surfaces were exposed to vacuum UV (VUV) photo-oxidation downstream from Ar microwave plasma. The modified surfaces showed the following: (1) an improvement in wettability as observed by water contact angle measurements; (2) surface roughening; (3) defluorination of the surface; and (4) incorporation of oxygen as CF-O-CF2, CF2-O-CF2 and CF-O-CF3 moieties for FEP and CF-O-CF2, CF2-O-CF2 and CF-O-CnF2n+i moieties for PFA. With long treatment times, cohesive failure of copper sputter-coated onto the modified surface occurred within the modified FEP and PFA and not at the Cu-FEP and Cu-PFA interface.
Materials Science and Engineering (MS)
Department, Program, or Center
Center for Materials Science and Engineering
Dasilva, Wagner, "Adhesion of copper to Teflon® FEP and PFA surfaces modified by vacuum UV photo-oxidation downstream from Ar microwave plasma" (2004). Thesis. Rochester Institute of Technology. Accessed from
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