Abstract

Poly(tetrafluoroethylene-co-hexafluoropropylene) (FEP) and tetrafluoroethylene-coperfluoroalkoxy vinyl ether) (PFA) surfaces were exposed to vacuum UV (VUV) photo-oxidation downstream from Ar microwave plasma. The modified surfaces showed the following: (1) an improvement in wettability as observed by water contact angle measurements; (2) surface roughening; (3) defluorination of the surface; and (4) incorporation of oxygen as CF-O-CF2, CF2-O-CF2 and CF-O-CF3 moieties for FEP and CF-O-CF2, CF2-O-CF2 and CF-O-CnF2n+i moieties for PFA. With long treatment times, cohesive failure of copper sputter-coated onto the modified surface occurred within the modified FEP and PFA and not at the Cu-FEP and Cu-PFA interface.

Library of Congress Subject Headings

Cathode sputtering (Plating process); Polytef; Copper plating; Adhesion; Far ultraviolet radiation; Microwave plasmas

Publication Date

2004

Document Type

Thesis

Student Type

Graduate

Degree Name

Materials Science and Engineering (MS)

Department, Program, or Center

Center for Materials Science and Engineering

Advisor

G. Takacs

Campus

RIT – Main Campus

Plan Codes

MSENG-MS

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