This thesis research proposes a novel and simple means of tilting micromirror on a microdroplet by utilizing thermocapillary actuated droplet deformation. Device theory, device design, fabrication, packaging, testing and results are discussed to demonstrate the operation of a 2-degrees-of-freedom (2- DOF) scanning micromirror. Thermocapillary, or Marangoni, effect and contact angle hysteresis are employed to control the droplet shape and position. Hysteresis in different liquids is studied with its influence on the stability of the droplet. The device consists of a micromirror placed onto a microdroplet, and can produce a 6.5° tilting angle when actuated at 30 V. The tilting angle is found to be almost linearly dependent on actuation voltage. Linear, square and circular laser scanning patterns were drawn to demonstrate its successful operation. This technique shows potential applications in scanning micromirror and display technology. Finally, possible future work is discussed to further improve the device performance.
Library of Congress Subject Headings
Optoelectronic devices--Design and construction; Light modulators--Design and construction; Microelectromechanical systems--Design and construction; Hysteresis
Department, Program, or Center
Microelectronic Engineering (KGCOE)
Dhull, Rakesh, "A Two degrees-of-freedom (DOF) scanning micromirror using thermocapillary effect in microdroplets" (2010). Thesis. Rochester Institute of Technology. Accessed from
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