An investigation of the possibility of spin-coating a silver halide emusion similar to that used on Kodak HRP plates onto a positive resist coating reticle blank was made. By changing the cating weight and temperature of the emulsion it was found that the emulsion could be coated onto the reticle without harm to the positive resist material. A five micron width line was imaged successfully and measured in the final chrome sub-layer of the reticle.
Library of Congress Subject Headings
Photographic emulsions; Photography--Printing processes--Silver
Department, Program, or Center
School of Photographic Arts and Sciences (CIAS)
St. Cin, Patrick, "Micro-circuit reticle fabrication: an investigation of a silver halide emulsion as a portable conformable mask" (1983). Thesis. Rochester Institute of Technology. Accessed from
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