Abstract
This paper discusses research on an automatic focusing system for IC-linewidth measuring instruments. The instrument incorporates a collimated light source, a device to move a sample in small, precise increments, and a charge-coupled device. The autofocusing model would measure the step-height of a dielectric sample and correlate the height to a focus position. Thickness of samples on an enlarged scale were measured to verify the feasibility of this device.
Library of Congress Subject Headings
Optical measurements--Instruments--Design; Integrated circuits--Masks--Measurement--Instruments; Semiconductor wafers--Measurement--Instruments
Publication Date
5-1-1985
Document Type
Thesis
Department, Program, or Center
School of Photographic Arts and Sciences (CIAS)
Advisor
Lechner, Hadrian
Recommended Citation
Ingraham, John, "Model automatic focusing system for linewidth measuring instruments" (1985). Thesis. Rochester Institute of Technology. Accessed from
https://repository.rit.edu/theses/5209
Campus
RIT – Main Campus
Comments
Note: imported from RIT’s Digital Media Library running on DSpace to RIT Scholar Works. Physical copy available through RIT's The Wallace Library at: QC367.I53 1985