Abstract
None provided.
Library of Congress Subject Headings
Excimer lasers--Industrial applications--Research; Microlithography--Research
Publication Date
12-1-1994
Document Type
Dissertation
Student Type
Graduate
Degree Name
Imaging Science (Ph.D.)
Department, Program, or Center
Chester F. Carlson Center for Imaging Science (COS)
Advisor
Marsh, Dana
Advisor/Committee Member
Arney, Jonathan
Advisor/Committee Member
Mouroulis, Pantazis
Recommended Citation
Smith, Bruce W., "Excimer laser microlithography at 193 NM" (1994). Thesis. Rochester Institute of Technology. Accessed from
https://repository.rit.edu/theses/3040
Campus
RIT – Main Campus
COinS
Comments
Note: imported from RIT’s Digital Media Library running on DSpace to RIT Scholar Works. Physical copy available through RIT's The Wallace Library at: TA1695 .S55 1994