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Journal of the Microelectronic Engineering Conference
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Home > RITAMEC > Vol. 7 (1997) > Iss. 1

 

Microelectronic Engineering Conference 1997

Papers

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Design of Experiments Using TMA WorkBench
James Daniels

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Pinched Diodes
Quynh Nguyen

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The IRIS Project: CCD's, Image Recognition, and All That Jazz
Abram M. Detofsky

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Integrated Electronics for Micro-Electromechanical Devices
Michael J. Frachel

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The Fabrication of Corrugated Silicon Surfaces
Alicia N. Bineyard

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BF2 Implanted Stacked a-Silicon Gate Capacitors
David Sanchez

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Thin Gate Oxides over Nitrogen Implanted Silicon
Luis J. Lopez

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Fabrication of Twin-well CMOS
Linh V. Phan

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Investigation of Buried Channel PMOS
Chuan-Hsing Chen

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Test Patterns for Chemical Mechanical Polish Characterization
Stanley J. Dobek

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Implementation and Electrical Characterization of Shallow Trench Isolation
John A. Castellana

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Development of Process Monitoring Monitoring Strategies for Contamination Control Utilizing a Surface Charge Analyzer
Raj Chakraborty

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SOI via Wafer Bonding
Bart U. Meshelle

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DC Reactive Sputtering of Transparent Conducting Indium Tin Oxide
Dan Fullerton

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The Design of an Inorganic BARC
Andrew Veter

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Super Resolution Techniques for DUV Optical Lithography
Dayo Pinkney

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Design and Characterization of an Optical Proximity Correction (OPC) Mask
Sumir Varma

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Resist Performance Using Spectroscopic Ellipsometry
Michael Y. Chan

 
 
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