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Home > RITAMEC > Vol. 7 (1997) > Iss. 1

Volume 7, Issue 1 (1997) Microelectronic Engineering Conference 1997

Papers

Design of Experiments Using TMA WorkBench
James Daniels

Pinched Diodes
Quynh Nguyen

The IRIS Project: CCD's, Image Recognition, and All That Jazz
Abram M. Detofsky

Integrated Electronics for Micro-Electromechanical Devices
Michael J. Frachel

The Fabrication of Corrugated Silicon Surfaces
Alicia N. Bineyard

BF2 Implanted Stacked a-Silicon Gate Capacitors
David Sanchez

Thin Gate Oxides over Nitrogen Implanted Silicon
Luis J. Lopez

Fabrication of Twin-well CMOS
Linh V. Phan

Investigation of Buried Channel PMOS
Chuan-Hsing Chen

Test Patterns for Chemical Mechanical Polish Characterization
Stanley J. Dobek

Implementation and Electrical Characterization of Shallow Trench Isolation
John A. Castellana

Development of Process Monitoring Monitoring Strategies for Contamination Control Utilizing a Surface Charge Analyzer
Raj Chakraborty

SOI via Wafer Bonding
Bart U. Meshelle

DC Reactive Sputtering of Transparent Conducting Indium Tin Oxide
Dan Fullerton

The Design of an Inorganic BARC
Andrew Veter

Super Resolution Techniques for DUV Optical Lithography
Dayo Pinkney

Design and Characterization of an Optical Proximity Correction (OPC) Mask
Sumir Varma

Resist Performance Using Spectroscopic Ellipsometry
Michael Y. Chan

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