Movable pin Joints, springs, sliders and Rotors have been constructed using silicon fabrication technology. The movable mechanical elements are built using sacrificial layers that are later removed to allow translation and rotation of the structures . The devices obtained physical movement and the rotors of the Rotors spun with compressed air, but electrical rotation of the motors was not accomplished.
Matessa, Matthew P.
"Fabrication of Micromechanical Devices: Pin Joints, Sliders, Springs, and Micromotors,"
Journal of the Microelectronic Engineering Conference: Vol. 5
, Article 16.
Available at: https://scholarworks.rit.edu/ritamec/vol5/iss1/16