Micromachining techniques were used to fabricate two versions of a small electromechanical device, a Micromotor. This structure, originally developed by a pair of graduate students at the University of California at Berkeley, then modified by a fifth year student a Rochester Institute of Technology, was formed through multiple polysilicon depositions. After an etch of approximately two hours, the rotors were shown to have released, and moved by mechanical means, however, movement was not achieved through electrical means.
Barker, Brian C.
"Micromachining: The Fabrication of a Micromotor,"
Journal of the Microelectronic Engineering Conference: Vol. 4
, Article 4.
Available at: https://scholarworks.rit.edu/ritamec/vol4/iss1/4