The feasibility of installing a multi-point particle monitoring system in the Rochester Institute of Technology Class 1000 Cleanroom at work level was examined. This consisted of monitoring 10 separate locations in the cleanroom at work level, including flow hoods, processing equipment and room air. An RS1 procedure was written to generate control charts and count information. The results showed that during low and high activity at a station the particle counts were in and out of process limits, respectively. Recommendations were made concerning installation of a complete system.
Pietra, Andrew La
"Multi-point Cleanroom Monitoring,"
Journal of the Microelectronic Engineering Conference: Vol. 3
, Article 17.
Available at: https://scholarworks.rit.edu/ritamec/vol3/iss1/17