This paper focuses on the design and fabrication of a surface MEMS three-axis accelerometer with comb-drive fingers that measures acceleration up to 10G in the x/y-direction, and 5G in the z-direction on a single device using capacitve sensing. The fabrication process was performed in the Semiconductor and Microsystems Laboratory (SMFL), with a 7 level process flow to achieve the desired features. The accelerometer was designed to have a movable top electrode with sensing fingers attached to it to sense the change in capacitance the x/y-direction and a bottom electrode to sense the change in z-direction. The paper will focus on the design, fabrication, and resulting defects that affected the device.
"Design and Fabrication of a Three-Axis Capacitive Accelerometer,"
Journal of the Microelectronic Engineering Conference: Vol. 24
, Article 25.
Available at: https://scholarworks.rit.edu/ritamec/vol24/iss1/25