Publication Date
4-25-2018
Document Type
Paper
Abstract
From Merriam-Webster dictionary, it states that peristalsis can best be described as "successive waves of involuntary contraction passing along the walls of a hollow muscular structure (such as the esophagus or intestine) and forcing the contents on- ward"[1]. The objective of this project was to create a peristaltic micropump at the Rochester Institute of Technology (RIT) Semiconductor and Microsystem Fabrication Laboratory (SMFL). Using Micro-Electro-Mechanical Systems (MEMS) to create a peristaltic pump to lower the energy used to move a uid through a tube. Using three single micro- machined micro-pumps in a straight line to create this type of action. Fabrication was done on 4 inch silicon substrates that were plasma etched use STS Plasma etcher.
Recommended Citation
Amendola, Nicholas
(2018)
"MEMS Fabrication of a Peristaltic Pump,"
Journal of the Microelectronic Engineering Conference: Vol. 24:
Iss.
1, Article 2.
Available at:
https://repository.rit.edu/ritamec/vol24/iss1/2