Development of a LFLE Double Pattern Process for TE Mode Photonic Devices

Authors

Mycahya Eggleston

Publication Date

5-8-2017

Document Type

Poster

Recommended Citation

Eggleston, Mycahya (2017) "Development of a LFLE Double Pattern Process for TE Mode Photonic Devices," Journal of the Microelectronic Engineering Conference: Vol. 23: Iss. 1, Article 7.
Available at: https://repository.rit.edu/ritamec/vol23/iss1/7