Publication Date
5-8-2017
Document Type
Presentation
Recommended Citation
Marini, Enri
(2017)
"Investigation of ALD Dielectrics in Silicon Capacitors,"
Journal of the Microelectronic Engineering Conference: Vol. 23:
Iss.
1, Article 20.
Available at:
https://repository.rit.edu/ritamec/vol23/iss1/20