Fabrication and characterization of mr-DWL photoresist buried channel waveguides on glass is carried out using the Heidelberg DWL 66+ (a laser direct write system). Waveguides are formed of mr-DWL-5 on glass with a spun on cladding material Norland Optical Adhesive-65(NOA- 65). The optical waveguides are successfully coupled at 650nm, and resonance structures tested at 710nm. Ring resonators with nominal spacing of .9um and a radius of 350um have an approximate quality factor of 71k .
"Direct Write Optical Waveguide Fabrication in organic films using a Heidelberg Laser Writer,"
Journal of the Microelectronic Engineering Conference: Vol. 22
, Article 28.
Available at: https://scholarworks.rit.edu/ritamec/vol22/iss1/28