A MEMS electrostatically actuated resonator with fixed-fixed and fixed-free cantilever beams is designed, simulated, fabricated, and tested. The fabrication of the MEMS resonators uses RIT’s MEMS fabrication 2016 process flow which is a surface micromachining process. The released fixed-free devices tested showed an increasing change in capacitance with an increasing actuation voltage. Inspection of the released fixed-fixed devices has a compressive stress in the second polysilicon film that causes the cantilever beam to bend above the actuation and sensing pads. Testing for resonance has not been successful. Some new considerations for the MEMS fabrication process and design are discussed.
Shyer, Daniel J.H.
"MEMS Electrostatically Actuated Resonator,"
Journal of the Microelectronic Engineering Conference: Vol. 22
, Article 21.
Available at: https://scholarworks.rit.edu/ritamec/vol22/iss1/21