This paper summarizes the process of designing, fabricating, and analyzing a series of MEMS switches. These devices are composed of a mechanical conductive polysilicon material being brought into contact to a signal line so as to rectify it. The parameters altered between each switch include the number of arms anchoring the mechanical polysilicon to the substrate and various dimensional constants. These dimensional constants include values for the width and length of the arms, and the area of the electrodes used in the electrostatic operation. Two sets of devices were fabricated for this paper, and data was obtained for the advancement of the MEMS fabrication process. A new design rule was formulated for this process, and device layout considerations were made to optimize the design for making a DC contact switch.
"Fabrication of Electrostatically Actuated MEMS Switch,"
Journal of the Microelectronic Engineering Conference: Vol. 22
, Article 11.
Available at: https://scholarworks.rit.edu/ritamec/vol22/iss1/11