In this paper, a MEMS Peltier Cooler was designed, fabricated, and tested to prove TEC (Thermoelectric Coolers) can be created with a fabrication process. Design was done using Mentor Graphics IC Station software, fabrication was done using a custom process, and testing was done using built in temperature sensors to observe the temperature difference between each side.
"Design, Fabrication, and Testing of a MEMS Peltier Cooler (TEC- Thermoelectric Cooler),"
Journal of the Microelectronic Engineering Conference: Vol. 20
, Article 8.
Available at: https://scholarworks.rit.edu/ritamec/vol20/iss1/8