Publication Date
1988
Document Type
Paper
Abstract
An Autosort Mark II wafer flatness tester was installed and initial runs and performance testing accomplished. A guide for aiding in every day use of the machine was written as well as a fortran program that performs a statistical analysis on performance data.
Recommended Citation
Waite, Jeff
(1988)
"Setup and Performance Testing of Autosort Mark II Flatness Analysis System,"
Journal of the Microelectronic Engineering Conference: Vol. 2:
Iss.
1, Article 33.
Available at:
https://repository.rit.edu/ritamec/vol2/iss1/33