Publication Date
1988
Document Type
Paper
Abstract
Using a “shadow mask” technique, a single level metal 3-phase CCD shift register was fabricated with electrode separations of 2 microns. Testing is pending at this time.
Recommended Citation
Gardner, John P.
(1988)
"Fabrication of a Single Level Metal CCD Shift Register,"
Journal of the Microelectronic Engineering Conference: Vol. 2:
Iss.
1, Article 15.
Available at:
https://repository.rit.edu/ritamec/vol2/iss1/15
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