Fabrication of a Single Level Metal CCD Shift Register

Authors

John P. Gardner

Publication Date

1988

Document Type

Paper

Abstract

Using a “shadow mask” technique, a single level metal 3-phase CCD shift register was fabricated with electrode separations of 2 microns. Testing is pending at this time.

Recommended Citation

Gardner, John P. (1988) "Fabrication of a Single Level Metal CCD Shift Register," Journal of the Microelectronic Engineering Conference: Vol. 2: Iss. 1, Article 15.
Available at: https://repository.rit.edu/ritamec/vol2/iss1/15