A Central—Composite Full Factorial design was performed in aiming to optimize the develop and bake processes on KTI 820 resist and KTI 934 developer using the GCA Wafertrac. The responses looked at were critical dimension and resist thickness after development with the independent variables of postbake temperature, postbake time and developer time. Analysis of the data was done using SAS as a software tool.
Dubash, Jamshed H.
"Response Surface Methodology Using Experimental Design,"
Journal of the Microelectronic Engineering Conference: Vol. 2
, Article 10.
Available at: https://scholarworks.rit.edu/ritamec/vol2/iss1/10