An electrolysis-bubble-actuated micro pump is created. The pump is created with a top surface gradient across the channel. This changing gradient will help to propel the bubble, created by electrolysis, forward. This micropump is implemented by taking advantage of both surface tension effect and the electrolysis actuation. The surface tension effect is controlled via the periodic generation of electrolytic bubbles and the roughness gradient design of the microchannel surface. The fabrication of the device was completed following the processes outlined in the design phase. Adhesion problems between the top surface and the silicon substrate were encountered during testing. As result, new layer for better adhesion needs to be implemented in future designs.
Villarroel, Suyana L.
Journal of the Microelectronic Engineering Conference: Vol. 17
, Article 21.
Available at: https://scholarworks.rit.edu/ritamec/vol17/iss1/21