This paper presents a simple way to build a MEMS based light modulator. Here Aluminum ribbons are suspended in an air gap. An array of these Al ribbons can be used to act as a light modulator. Alternate Al ribbons are connected to a DC bias of 50V which will curve downwards due to the stress applied and electrostatic attraction. Thus, the light intensity can be modulated to any shade of gray needed or even turn it off completely. Different sizes of light modulators were built using Mentor Graphics and were fabricated in the RIT, SMFL. Final results did not work as desired due to the bending of the aluminum ribbons for 800 m long Al ribbons. 80 m long Al ribbons, in contrast, were suspended.
"MEMS Based Light Modulator,"
Journal of the Microelectronic Engineering Conference: Vol. 15
, Article 18.
Available at: https://scholarworks.rit.edu/ritamec/vol15/iss1/18