Publication Date
1987
Document Type
Paper
Abstract
Cross-section staining of p-type diffusions was investigated. The method employed a stain formulation of Diffusion depths of 1.9 microns were delineated and photographed using a scanning electron microscope.
Recommended Citation
Eynon, Benjamin G. Jr
(1987)
"Diffusion Staining Techniques,"
Journal of the Microelectronic Engineering Conference: Vol. 1:
Iss.
1, Article 9.
Available at:
https://repository.rit.edu/ritamec/vol1/iss1/9