Publication Date
1987
Document Type
Paper
Abstract
A procedure for making A vs v plots to analyze ellipsometer readings was generated. This replaced the look-up tables. The refractive index and thickness were generated using the Mccrackin Ellipsometer program.1 This program was debugged.
Recommended Citation
Bizri, Wael A.
(1987)
"Analysis of Ellipsometer Measurements,"
Journal of the Microelectronic Engineering Conference: Vol. 1:
Iss.
1, Article 2.
Available at:
https://repository.rit.edu/ritamec/vol1/iss1/2