Publication Date
1987
Document Type
Paper
Abstract
Implementation of a computerized clean room monitoring system at the RIT facility and the benefits of the RIT Management Program are discussed in this paper. Clean room parameters of interest with respect to environment, contamination, and process control were identified and the management of a commercial and university clean room will be contrasted.
Recommended Citation
Acito, William P. Jr
(1987)
"University Clean Room Management Program,"
Journal of the Microelectronic Engineering Conference: Vol. 1:
Iss.
1, Article 1.
Available at:
https://repository.rit.edu/ritamec/vol1/iss1/1