Description
A critical aspect of semiconductor manufacturing is the design and analysis of material handling and production control polices to optimize fab performance. As wafer sizes have increased, semiconductor fabs have moved to-ward the use of automated material handling systems (AMHS). However, the behavior of AMHS and the effects of AMHS on fab productivity is not well understood. This research involves the development of a design and analysis methodology for evaluating the throughput capacity of AMHS. A set of simulation experiments is used to evaluate the throughput capacity of an AMHS and the effects on fab performance measures. The analysis uses SEMATECH fab data for full semiconductor fabs to evaluate the AMHS throughput capacity.
Date of creation, presentation, or exhibit
12-2004
Document Type
Conference Paper
Department, Program, or Center
Industrial and Systems Engineering (KGCOE)
Recommended Citation
M. E. Kuhl and J. Christopher, "Capacity analysis of automated material handling systems in semiconductor fabs," Proceedings of the 2004 Winter Simulation Conference, 2004., 2004, pp. 1962-1966 vol.2. doi: 10.1109/WSC.2004.1371556
Campus
RIT – Main Campus
Comments
© 2004 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
Note: imported from RIT’s Digital Media Library running on DSpace to RIT Scholar Works in February 2014.