Description
A simple null modulation-polarization method of measuring optical constants of metals has been adapted for operation with a KrF 248nm excimer laser. The approach requires only 3 optical components to extract the real and imaginary parts of the index of refraction (n,k). Experimental results will show good agreement to reference values for several metals (Cr, Au, Al) and Si.
Date of creation, presentation, or exhibit
5-22-1995
Document Type
Conference Paper
Department, Program, or Center
Microelectronic Engineering (KGCOE)
Recommended Citation
Suleyman Turgut, Bruce W. Smith, "Direct measurement of optical constants of metals from a KrF excimer using polarization methods", Proc. SPIE 2439, Integrated Circuit Metrology, Inspection, and Process Control IX, (22 May 1995); doi: 10.1117/12.209235; https://doi.org/10.1117/12.209235
Campus
RIT – Main Campus
Comments
Copyright 1995 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Note: imported from RIT’s Digital Media Library running on DSpace to RIT Scholar Works in February 2014.