The gas and effective electron temperatures have been estimated for atmospheric microplasma by means of optical emission spectroscopy. The results have shown that the microplasma exhibits nonequilibrium and, as its size is reduced, the two temperatures depart from each other, enhancing the nonequilibrium characteristic. The effect of methane and oxygen concentrations has also been studied, showing that gas mixtures have an important effect on the microplasma state.

Publication Date



Copyright 2008 American Institute of Physics

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The following article appeared in Applied Physics Letters 92, 151505 and may be found at https://doi.org/10.1063/1.2912039

Document Type


Department, Program, or Center

Microelectronic Engineering (KGCOE)


RIT – Main Campus