Location
Rochester Institute of Technology
Start Date
5-2015 12:00 AM
End Date
5-2015 12:00 AM
Description
Goal: Modify carbon hard mask to minimize reflectivity and enable line-width trimming.
- Work in conjunction with Master’s thesis work to create an ideal carbon hard mask layer.
- Determine necessary PECVD parameters for processing
COinS
May 1st, 12:00 AM
May 1st, 12:00 AM
Carbon Hard Mask for Line Width Trimming
Rochester Institute of Technology
Goal: Modify carbon hard mask to minimize reflectivity and enable line-width trimming.
- Work in conjunction with Master’s thesis work to create an ideal carbon hard mask layer.
- Determine necessary PECVD parameters for processing