Joanna Kiljan

Abstract

In this work a micro-electro-mechanical system (MEMS) is proposed for radio frequency (RF) switching applications. MEMS devices outperform the traditionally used solid-state devices in areas such as isolation, insertion loss, and linearity. However, micro switches suffer from high actuation voltage, lifetime limitations, and high packaging cost. A novel micro switch design that incorporates embedded charge in a cantilever structure can, in principle, enable low-voltage operation. This was the primary motivation for this study

Library of Congress Subject Headings

Microelectromechanical systems; Electrets; Microelectronics; Electric switchgear; Electric charge and distribution

Publication Date

2004

Document Type

Thesis

Department, Program, or Center

Microelectronic Engineering (KGCOE)

Advisor

Hirschman, Karl

Advisor/Committee Member

Raisanen, Alan

Advisor/Committee Member

Kurinec, Santosh

Comments

Note: imported from RIT’s Digital Media Library running on DSpace to RIT Scholar Works. Physical copy available through RIT's The Wallace Library at: TK7875 .K55 2004

Campus

RIT – Main Campus

Download

Share

COinS