Abstract

A linewidth measurement system has been developed which incorporates a coherent laser microspot with a piezo flexure-pivot translational stage. A line is scanned beneath the microspot and reflected energy collected with an on axis geometry normal to the wafer. Position versus reflectance data are presented for lines patterned in thick and thin oxide films on I.e. wafers.

Library of Congress Subject Headings

Photographic optics

Publication Date

7-1-1981

Document Type

Thesis

Department, Program, or Center

School of Photographic Arts and Sciences (CIAS)

Advisor

Nyyssonen, Diana

Comments

Note: imported from RIT’s Digital Media Library running on DSpace to RIT Scholar Works in December 2013.

Physical copy available from RIT's Wallace Library at TR220 .P65

Campus

RIT – Main Campus

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