In this thesis we present design, fabrication and testing of several photonic devices on a silicon-on-insulator (SOI) substrate. The historical developments in micro-optic technology including problems it has faced and its current state of maturity is outlined. The most recent integration trends of electronics and optics, particularly the transition of micro-optics to silicon on insulator platform will be reviewed. With this foundation in silicon photonics several rib waveguide structures including directional couplers, WDM couplers, y-branches and MMI splitters are designed, simulated, and fabricated on an SOI substrate. Beam propagation method (BPM) was used in the modeling of these devices. Computation time is reduced by using a least squared regression to predict coupler behavior and losses in devices with varying dimensions and shape. A fabrication procedure is developed, characterized and implemented. The final devices are tested, and qualitative results provided.
Library of Congress Subject Headings
Silicon-on-insulator technology; Optical wave guides--Design and construction; Optical wave guides--Materials; Silicon--Optical properties
Department, Program, or Center
Electrical Engineering (KGCOE)
Harvey, Eric, "Design and fabrication of silicon on insulator optical waveguide devices" (2006). Thesis. Rochester Institute of Technology. Accessed from
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