Abstract

Stepper lenses are tested by the lens manufacturer using various interferometric methods like phase measurement interferometry (PMI), before they are assembled onto the stepper or scanner. Once the system is set up, there are a few methods to study the lens aberrations in-situ using interferometry. The methods currently used are direct ones like direct aerial image measurement (DAIM) or indirect ones in which images of lines and spaces are formed in the photoresist and the aberrations inferred from scanning electron microscope (SEM) images of these. We propose using phase shifting point diffraction interferometry (PSPDI) for the purpose of measuring aberrations in-situ. The method has the advantages of being simple, and of having relaxed coherence length requirements and applicability over a wide wavelength range. We present results from a prototype experiment done on a 436 nm optic on an optical bench using a 442 nm He-Cd laser as source.

Library of Congress Subject Headings

Aberration; Optical measurements; Interferometry; Interferometers; Diffraction patterns

Publication Date

5-1-2002

Document Type

Thesis

Department, Program, or Center

Chester F. Carlson Center for Imaging Science (COS)

Advisor

Ninkov, Zoran

Advisor/Committee Member

Michaloski, Paul

Comments

Note: imported from RIT’s Digital Media Library running on DSpace to RIT Scholar Works. Physical copy available through RIT's The Wallace Library at: QC367 .V465 2002

Campus

RIT – Main Campus

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