Many different devices capable of spectral wavelength collection exist. The device we propose is an array of individually tunable MEMS Fabry Perot etalons capable of scanning from 400nm to 750nm as commanded. Typically when Fabry Perot devices are used additional etalons are placed in series to reject extra modes that would otherwise be passed by a single etalon. The device that is examined rejects the extra modes without the need for an extensive filtering scheme because the optical path length is held to ½ wavelength. The device proposed is thermally actuated. It has been modeled in COMSOL and shows even rise of the top etalon mirror surface through a 175nm range of motion. The device can scan through the spectral range and back at a frequency of 100Hz. Optical performance of the device has been modeled and it does show the ability to select wavelengths throughout the entire visible range.
Library of Congress Subject Headings
Microelectromechanical systems--Design and construction; Imaging systems--Design and construction; Photonics; Fabry-Perot interferometers
Department, Program, or Center
Chester F. Carlson Center for Imaging Science (COS)
Rivas, Annette, "Tunable micro-electro mechanical Fabry Perot etalon" (2011). Thesis. Rochester Institute of Technology. Accessed from
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