Minority carrier lifetimes are a useful parameter in both the design and manufacture of discrete and integrated circuits. With today’s emphasis on MOS technology, minority carriers are used as a “process cleanliness” tool in a manufacturing environment. The purpose of this project is to compare the two available carrier lifetime tests, namely the Semitest Surface Charge Analyzer (SCA) and capacitance-time and seeing if the relationship is linear. Being linear, the more process intensive capacitance-time test can be avoided and all pertinent data can be extracted via the SCA, therefore increasing product cycle time and time to market. 200A thermal oxide gate capacitors were manufactured and tested, SCA analysis was taken with the oxide grown prior to aluminum evaporation.
"Comparison of Minority Carrier Lifetime Measurement by Surface Charge and Capacitance - Time Analysis,"
Journal of the Microelectronic Engineering Conference: Vol. 8
, Article 12.
Available at: http://scholarworks.rit.edu/ritamec/vol8/iss1/12