Corrugation of silicon surfaces is desired for a variety of applications requiring availability of increased surface area and modification of optical properties of thin films. Such surfaces also prevent refractive trapping in luminescent films and can provide lambertian emissive surfaces. The objective of this research is to fabricate these corrugated silicon surfaces using a specially customized mask consisting of four different design patterns. The goal is to prove that the smallest design pattern will provide the best characteristics for enhancing the light emission of luminescent films. The surface morphology, etching process and the luminescent properties of the etched samples have been described.
Bineyard, Alicia N.
"The Fabrication of Corrugated Silicon Surfaces,"
Journal of the Microelectronic Engineering Conference: Vol. 7
, Article 5.
Available at: http://scholarworks.rit.edu/ritamec/vol7/iss1/5