TMA WorkBench software is used to interface with Suprem4 process simulator and Medici electrical test software in order to set up, run and analyze Design of Experiments for process simulation. A method for simulation tuning was found, and an example experiment was run and analyzed. Comparison to a fabricated experiment was planned in order to provide feedback for simulation tuning and to verify a simulated approach to process experimenting. Least squares analysis was used to find response function coefficients, as well as to plot factor-response contour maps.
"Design of Experiments Using TMA WorkBench,"
Journal of the Microelectronic Engineering Conference: Vol. 7
, Article 1.
Available at: http://scholarworks.rit.edu/ritamec/vol7/iss1/1