Publication Date
1-1-1997
Document Type
Paper
Abstract
TMA WorkBench software is used to interface with Suprem4 process simulator and Medici electrical test software in order to set up, run and analyze Design of Experiments for process simulation. A method for simulation tuning was found, and an example experiment was run and analyzed. Comparison to a fabricated experiment was planned in order to provide feedback for simulation tuning and to verify a simulated approach to process experimenting. Least squares analysis was used to find response function coefficients, as well as to plot factor-response contour maps.
Recommended Citation
Daniels, James
(1997)
"Design of Experiments Using TMA WorkBench,"
Journal of the Microelectronic Engineering Conference: Vol. 7:
Iss.
1, Article 1.
Available at:
https://repository.rit.edu/ritamec/vol7/iss1/1