An overview or Energy Dispersive Spectroscopy (EDS) X-ray microanalysis is presented with attention to artifacts present in the X—ray spectrum, such as the Bremsstrahlung, sum peaks, and silicon escape peaks. Sample spectra obtained from Al on Si, Cu on 51, and PZT ferroelectric films demonstrated the capability of obtaining qualitative elemental composition. The elemental spatial distribution, or the X—ray mapping. capability was also demonstrated utilizing a special alloy sample.
"Energy Dispersive Spectroscopy X-Ray Microanalysis,"
Journal of the Microelectronic Engineering Conference: Vol. 5
, Article 6.
Available at: http://scholarworks.rit.edu/ritamec/vol5/iss1/6