Characterization of a GCA 4800 stepper was done in order to assess the system capability for image quality and overlay. This was achieved through running stepper jobs two or three times per week. Data was statistically analyzed and the results showed good agreement with accepted values with the exception of system registration .
Coniff, John M.
"Performance Characterization of a GCA 4800 Stepper,"
Journal of the Microelectronic Engineering Conference: Vol. 4
, Article 7.
Available at: http://scholarworks.rit.edu/ritamec/vol4/iss1/7