Carborundum PH-1025 Solid Planar Diffusion Sources were used to perform a statistically designed diffusion matrix. The data taken from this matrix included junction depth, sheet resistance and transferred glass thickness. Modifications to the existing SUPREM-Ill diffusion model failed to produce good correlation between SUPREM-Ill and the experimental data.
Printy, Craig R.
"Process Modeling of Solid Source Phosphorus Diffusions Using SUPREM-III,"
Journal of the Microelectronic Engineering Conference: Vol. 4
, Article 30.
Available at: http://scholarworks.rit.edu/ritamec/vol4/iss1/30