Utilization of the GCA DSW 4800 as a PHOTOREPEATER enables the production of masks with flexibility, resolution, speed, and precision. A new chuck directly interchangeable with a standard GCA 100 Millimeter wafer chuck was machined for simple conversion from STEPPER to PHOTOREPEATER. Commercial Chrome plates and Quartz plates with thermally evaporated Aluminum films were coated with KTI-820, exposed, and etched. Chrome film resolved to 1 micron and the Etched Aluminum resolved to 3 microns.
Bruck, Scott M.
"Using the GCA 4800 DSW Wafer Stepper as a Photorepeater for the Fabrication of Chrome and Aluminum Masks,"
Journal of the Microelectronic Engineering Conference: Vol. 3
, Article 5.
Available at: http://scholarworks.rit.edu/ritamec/vol3/iss1/5