Construction of a Quasi-Static C-V Test Station

Authors

Randall J. Mason

Publication Date

1989

Document Type

Paper

Abstract

The construction of a Quasi—Static C—V measurement tool and proper operation are presented. Gate oxides were analyzed for ion implanted regions. Guidelines for obtaining higher quality Quasi—Static C—V measurements will be presented.

Recommended Citation

Mason, Randall J. (1989) "Construction of a Quasi-Static C-V Test Station," Journal of the Microelectronic Engineering Conference: Vol. 3: Iss. 1, Article 25.
Available at: https://repository.rit.edu/ritamec/vol3/iss1/25