Publication Date
7-22-2016
Document Type
Presentation
Recommended Citation
Herrfurth, Mattias
(2016)
"Fabrication of MEMS Electrostatically Actuated Switch,"
Journal of the Microelectronic Engineering Conference: Vol. 22:
Iss.
1, Article 12.
Available at:
https://repository.rit.edu/ritamec/vol22/iss1/12