Capacitance—Time (C—T) plots were generated using a Micromanipulator model 410 CV system with a Yokogawa 3022 A4 x—Y recorder (with time base activated). MOS capacitors were pulsed instantaneously from accumulation into deep—depletion. The capacitance was then recorded as the samples relaxed back to their equilibrium state (Cmin). The method used to analyze the C—T data was known as a ZERBST analysis. A FORTRAN program was created to handle the differentiating required for the ZERBST plot. Preliminary results indicate that this set—up will accurately determine minority carrier lifetimes.
DeNero, Patrick M.
"Determination of Minority Carrier Lifetimes Using The Capacitance-Time Technique,"
Journal of the Microelectronic Engineering Conference: Vol. 2
, Article 8.
Available at: http://scholarworks.rit.edu/ritamec/vol2/iss1/8