Publication Date
1988
Document Type
Paper
Abstract
This project dealt with the design and installation of a TCA bubbler system. Considerations for safety and temperature control of the TCA were simplified by the use of a J.C. Schumacher Flow Temperature Control unit. Installation of the system is complete and chlorinated oxides have been grown.
Recommended Citation
Ward, Steven D.
(1988)
"Design, Construction, and Qualification of a Chlorinated Oxide Growth Process,"
Journal of the Microelectronic Engineering Conference: Vol. 2:
Iss.
1, Article 34.
Available at:
https://repository.rit.edu/ritamec/vol2/iss1/34