An Autosort Mark II wafer flatness tester was installed and initial runs and performance testing accomplished. A guide for aiding in every day use of the machine was written as well as a fortran program that performs a statistical analysis on performance data.
"Setup and Performance Testing of Autosort Mark II Flatness Analysis System,"
Journal of the Microelectronic Engineering Conference: Vol. 2
, Article 33.
Available at: http://scholarworks.rit.edu/ritamec/vol2/iss1/33